Tools for wafer processing

We are designing, making, and testing instruments for semiconductor wafer processing.

Wafer Hot Plates

  • HAMOPLUS
    $3,684.98 USD
    $3,684.98 USD
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  • Image slide

  • Tell your brand's story through images

  • with SS cap screws

Image slide

Tell your brand's story through images

with SS cap screws

How to load/unload wafer

Cap screws for vacuum holes and holding wafer

- Depending wafer size, one can block vacuum-ring holes.

- 2 cap screws are for holding wafer from sliding over top surface of the hot plate.

Leaning the wafer on top surface.

1) After leaning the wafer on 2 side cap screws, release it gently.

Vacuum holding the wafer

2) Keep 1~2 mm spacing from the 2 side cap screws.

3) Turn on Vacuum switch.

** Use the reverse sequence for unloading the wafer.